Name: Microlithography
Price: 67.25 EUR
ISBN: 9781032836737

Microlithography

Science and Technology

Description

Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.

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Writer
Title: Microlithography
Publisher: Taylor & Francis Ltd

Year: 2024
Language: English
Pages: 850
Weight: 1522 gr

EAN: 9781032836737
Dimensions: 256 x 181 x 46 mm
Binding format: Paperback / softback

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Microlithography

Science and Technology

Description

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