Run-to-Run Control in Semiconductor Manufacturing

Description

Offers analyses of run-to-run (R2R) control. Through manufacturing case studies, this book provides justification for and demonstrates the benefits of run-to-run control, and offers the know-how and direction for incorporating R2R control into readers' manufacturing capabilities.
€ 251,55
Gebonden
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€ 19,95 within The Netherlands
Writer
Title
Run-to-Run Control in Semiconductor Manufacturing
Publisher
Taylor & Francis Inc
Year
2000
Language
English
Pages
366
Weight
612 gr
EAN
9780849311789
Dimensions
229 x 152 x 19 mm
Binding format
Gebonden

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Categories

Boekstra