Fundamental Electron Interactions with Plasma Processing Gases
Loucas G. Christophorou, James K. Olthoff
Description
The primary electron-molecule interaction processes of elastic and in elastic electron scattering, electron-impact ionization, electron-impact dissociation, and electron attachment are discussed, and state-of-the art authoritative data on the cross sections of these processes as well as on rate and transport coefficients are provided.
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