Thin Film Analysis by X-Ray Scattering

Techniques for Structural Characterization

Description

With contributions by Paul F. Fewster and Christoph Genzel While X-ray diffraction investigation of powders and polycrystalline matter was at the forefront of materials science in the 1960s and 70s, high-tech applications at the beginning of the 21st century are driven by the materials science of thin films.
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Writer
Birkholz, Mario (IHP Microelectronics
Title
Thin Film Analysis by X-Ray Scattering
Publisher
Wiley-VCH Verlag GmbH
Year
2005
Language
English
Pages
378
Weight
839 gr
EAN
9783527310524
Dimensions
241 x 171 x 26 mm
Binding format
Gebonden

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